Universal AC input (typically 100–240 VAC, 50/60 Hz).
The Astron 2L supports different operational modes to suit various applications:
Because improper operation can lead to catastrophic hardware damage or exposure to lethal high-voltage and toxic chemicals, adhering closely to the official is critical. This article compiles technical specifications, essential safety protocols, installation prerequisites, and basic operating guidelines extracted from the standard documentation for MKS ASTeX systems. Core Specifications & Capabilities
: The manual highlights a compact, "lid-mountable" architecture that combines the power source , control module , and plasma chamber into one 47-lb unit (approx. Operational and Environmental Responsibility mks astron 2l manual
). Always verify that your exhaust abatement or scrubbers are properly equipped to treat these toxic compounds. Note that standard water scrubbers are typically ineffective at capturing un-dissociated NF3cap N cap F sub 3 : Argon (
The Ar can be turned off once NF₃ plasma is fully stabilized. B. Shutdown Turn off NF₃: Stop the reactant gas flow.
The rear D-sub interface allows for automated system control: Universal AC input (typically 100–240 VAC, 50/60 Hz)
| Pin | Signal | Description | |-----|--------|-------------| | 1 | HV Return | High voltage return | | 2 | Case Ground | Chassis ground | | 3 | HV Out | -3.5 kV to -5 kV to gauge | | 4 | Current In | Gauge current signal | | 5 | NC | Not connected | | 6 | Shield | Cable shield | | 7 | +24V In | Power input (if using DC) | | 8 | Power Return | Ground for power | | 9 | NC | Not connected |
The Astron 2L is a compact, remote plasma source that operates using RF (Radio Frequency) power to create a plasma outside the process chamber. This remote approach minimizes damage to sensitive chamber components compared to in-situ plasma.
The Astron 2L comes partially assembled, but the gantry requires attention. Core Specifications & Capabilities : The manual highlights
The MKS Astron 2L is a high-performance, compact power supply designed primarily for semiconductor processing equipment, plasma generators, and precise industrial applications. This guide serves as a comprehensive manual for operators, technicians, and engineers looking to install, operate, and troubleshoot the MKS Astron 2L system safely and efficiently. 1. Product Overview and Technical Specifications
The high-density toroidal plasma generates significant thermal load.
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